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AML Ultra High Vacuum Stepper Motors

AML stepper motors are specifically designed for use in UHV environments making them ideally suited for low-speed precision in-vacuum manipulation without the use of particle generating motion feed-throughs. The considerable reduction in mechanical complexity, absence of metal to metal sliding surfaces and low outgassing characteristics make these motors especially suitable for sensitive handling applications.

  • Suitable for use below 1 x 10-10 mBar (7.5 x 10-11 Torr)
  • Continuous running in vacuum at high torque and step rates with AML drive
  • Bakeable to 200 °C
  • Step angle of 1.8°
  • Step angle tolerance of ±5%
  • Operational temperature range -65 °C to +190 °C
  • Embedded thermocouple or PT100 sensor
  • Open construction with all internal spaces vented
  • Open hybrid ceramic bearings, lubricated with NyeTorr® 6300 ultra-low outgassing UHV grease 
  • Gamma radiation hard versions available 1 x 106 Gy
  • Dry lubricated (tungsten disulfide) hybrid silicone nitride ceramic bearings option available
  • Custom shaft modifications available

These motors are also available for cryogenic extended operating temperature option available, range -196 °C to +190 °C

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Ultra High Vacuum Stepper Motors