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AML Ultra High Vacuum Stepper Motors

AML Ultra High Vacuum Stepper Motors are specifically designed for use in UHV environments making them ideally suited for low-speed precision in-vacuum manipulation without the use of particle generating motion feed-throughs. The considerable reduction in mechanical complexity, absence of metal to metal sliding surfaces and low outgassing characteristics make these motors especially suitable for sensitive handling applications.

  • Suitable for use below 1 x 10-10 mBar (7.5 x 10-11 Torr)
  • Continuous running in vacuum at high torque and step rates with AML drive
  • Bakeable to 200 °C
  • Step angle of 1.8°
  • Step angle tolerance of ±5%
  • Operational temperature range -65 °C to +190 °C
  • Embedded thermocouple or PT100 sensor
  • Open construction with all internal spaces vented
  • Open hybrid ceramic bearings, lubricated with NyeTorr® 6300 ultra-low outgassing UHV grease 
  • Gamma radiation hard versions available 1 x 106 Gy
  • Dry lubricated (tungsten disulfide) hybrid silicone nitride ceramic bearings option available
  • Custom shaft modifications available

These motors are also available for cryogenic extended operating temperature option available, range -196 °C to +190 °C

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Ultra High Vacuum Stepper Motors

AML X/Y Axis Vacuum Translation Stage

AML ultra high vacuum compatible modular linear translation stages
provide translation for loads of up to several tens of kilograms. They
can be used standalone or as part of a complex motion system, as they are compatible with the range of VSM17 modular stage. They have very high rigidity, which is necessary where several transporters are stacked for compound motion or where offset loads are present.
They are manufactured with UHV compatible material and construction
methods and utilise AML UHV stepper motors.

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

AML VSM17-X Translation Stage

AML Z Axis Vacuum Translation Stage

AML ultra high vacuum compatible vertical linear translation stages for z-axis translation of loads up to [X].

They can be used standalone or as part of a complex motion system, as they are compatible with the range of VSM17 modular stage. The
VSM17-Z is designed specifically for Z-axis translation with its high load capacity. They are manufactured with UHV compatible material and
construction methods and utilise AML UHV stepper motors.

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

AML VSM17-Z Translation Stage

AML Vacuum Rotary Stage

AML ultra high vacuum compatible rotation stages are manufactured with UHV compatible material and construction methods in an ISO 7
cleanroom and utilise AML D35.1 UHV stepper motors.

The VSM17-R stages feature a precision cross-roller ring bearing system, providing high rotational accuracy capable of bearing loads in every direction. It has a 18 mm clear aperture, anti-backlash spur gearing and can optionally be fitted with an optical UHV compatible rotary encoder.

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

AML VSM17-R Rotation Stage

AML Vacuum Goniometer Stage 70

AML ultra high vacuum compatible goniometer stage with ±15° travel,
provides rotation on a transverse axis above the table.

Can be used standalone or as part of a complex motion system when combined with other VSM17 modular stages. It is possible to build a Euler gonimeter with a common center of rotation when combined with a VSM17-G-114.

The VSM17-G features rigid construction to allow for high load capacity whilst maintaining smooth motion through the full range of travel. They are manufactured with UHV compatible material and construction methods and utilise AML UHV stepper motors.

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

AML VSM17-G-070 Goniometer Stage

AML Vacuum Goniometer Stage 114

AML ultra high vacuum compatible goniometer stage with ±90° travel,
provides rotation on a transverse axis above the table.

Can be used standalone or as part of a complex motion system
when combined with other VSM17 modular stages. It is possible to build a Euler gonimeter with a common center of rotation when combined with a VSM17-G-070.

The VSM17-G features rigid construction to allow for high load capacity whilst maintaining smooth motion through the full range of travel. They are manufactured with UHV compatible material and construction methods and utilise AML UHV stepper motors.

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

AML VSM17-G-114 Goniometer Stage

Application Examples

AML Planetary Gearheads

AML Planetary Gearheads PG42 series gearheads couple directly to AML D42 stepper motors and are suitable for use in UHV environments. Primarily used for increasing resolution, torque multiplication and inertia matching. They are designed for maximum torque capacity, high efficiency and low backlash.

Features:

  • Suitable for use below 1 x 10-10 mBar
  • Multiple ratio options, 4:1 through 100:1
  • High efficiency, >94%
  • Low inertia
  • High precision, low backlash
  • Service life >10,000 Hrs
  • Bakeable to 200°C
  • RoHS compliant

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Vacuum Planetary Gearheads

AML SMD210-1U Rack Mount Stepper Drive

AML SMD210-1U Rack Mount Stepper Drive the SMD210 Vacuum-Compatible Stepper Motor Drive is designed to match AML UHV motors. Two motors may be driven sequentially under host computer control or by an internally stored program.

Manual operation is also available from the front panel switches or
a hand-held joystick.

Features:

  • Drives 2 UHV stepper motors sequentially.
  • Advanced low-power drive techniques for minimum motor temperature rise and outgassing and maximum operating time.
  • Phase currents can be set from 0.1 to 1A in increments of 0.1A.
  • Holding torque can be controlled independently of dynamic torque under program control, to reduce power.
  • Full, half, ÷4, ÷8 step drive modes with automatic transition at user selectable speeds. (Stops on full step positions only. Micro-stepping used for control of resonance and smoother step transition.)
  • Thermocouple amplifiers (type K) for motor temperature indication, protection and control of motor bakeout.
  • RS232C interface for host computer control. Drive programs can be developed and run from the computer console (Remote Program Control) or downloaded for stand-alone operation (Internal Program Control).
  • Motors may be operated manually with the front panel ‘STEP’ switches or with a joystick. Single-step or multiple-step operation with smooth acceleration to the selected speed.
  • 3 user inputs for interaction with program execution, in addition to two “End of travel” inputs for each motor.
  • 3 user outputs for switching under program control.
  • Simple control language has many powerful commands which allow control of all aspects of motion or position. Conditional operation, loops and jumps are possible.
  • 1U high full-width, steel-cased instrument for easy rack-mounting.
  • Operates from 100 to 240V, 50/60 Hz supply.

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Rack Mount Stepper Drive

AML SMD3 Face Mounted Stepper Drive

AML SMD3 Face Mounted Stepper Drive is a single-axis bipolar stepper motor driver that is engineered to drive vacuum-compatible stepper motors with maximum performance and minimal heat. It is optimised for use with AML UHV-compatible motors.

Powerful software is supplied with the SMD3 that enables you to control and configure multiple SMD3 devices simultaneously, in a single user-friendly graphical interface.

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Face Mounted Stepper Drive

AML Vacuum Cable Connector

AML Vaccum Cable Connect UHV PEEK 7-Way has the following features:

  • 7-way male and female connectors suitable for use in UHV
  • Bakeable to 250°C
  • 200V, 5 A per pin. 15 A maximum per connector
  • Gold plated pin/socket crimp contacts included. 26~24 AWG
  • PEEK connectors with locking screws
  • Surface mountable

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Vacuum Cable Connectors

AML Vacuum Limit Switch

AML Vacuum Limit Switch the VLS1 limit switch is used for repeatable limit detection for in-vacuum motor systems.

The switch is normally-closed (NC) and can be connected directly to an SMD3 stepper motor drive.

Features:

  • UHV-compatible material construction
  • Suitable for use to 1.3 x 10-10 mBar (1 x 10-10 Torr)
  • High temperature – bakeable to 250°C
  • Radiation resistant
  • Normally-closed (NC)
  • 22 AWG polyimide insulated wires
  • 3/8-24 UNF external thread with 2 matching nuts

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Vacuum Limit Switch

AML Vacuum Connectors and Cable Feedthroughs

AML Vacuum Connectors and Cable Feedthroughs range of wiring accessories to complement their UHV compatible stepper motors. These components make installation of motors and other electrical items in vacuum much easier.

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Cable Feedthroughs

AML Ion Gauge and Controller

AML Ion Gauge and Controller the AML AIG nude ionization gauge is a high-sensitivity UHV Bayard-Alpert gauge covering the vacuum range of 3×10-11 to 1×10-3 mbar and is intended for electron-bombardment degas. It has an NW35CF flange with individual glass compression seals, closed-end grid and a choice of filament materials.

Features:

  • Wide measuring range 3×10-11 to 1×10-3 mbar
  • Replaceable twin Tungsten, Thoria or Yttria-coated Iridium filaments
  • Individual glass compression seal around each feedthrough pin are more economical and robust than ceramic, resulting in a less expensive and more rugged gaugehead, with the central collector pin inherently guarded against leakage currents by the grounded bulk of the flange
  • The molybdenum grid has a closed-end, light, rigid structure, resulting in high sensitivity. The XRay induced electron desorption current at the collector is minimised by geometry and screening
  • Connector pins are gold-plated, shrouded and polarized. Gold plating ensures that oxidation on the air-side cannot occur even after repeated bakeouts
  • Maximum bakeout temperature 450 °C. Sensitivity 19 per mbar for nitrogen. X-Ray asymptote 3×10-11 mbar
  • RoHS compliant

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Ion Gauge and Controller

AML PV3 Pirani Gaugeheads

AML PV3 Pirani Gaugeheads detect the cooling effect of residual gas molecules on a heated filament. The rate of heat transfer to the gas is related to pressure and causes a change in the electrical resistance of the filament or the amount of power required to maintain it at constant temperature. The filament is normally connected in a bridge circuit.

Features:

  • Range: 200 mbar to 1 x 10-3 mbar
  • Intended for use in constant-voltage bridge circuits, which reduces the filament temperature and the rate of filament corrosion or contamination at high pressures
  • May be interchanged between any AML NGC / PGC series or equivalent controllers without recalibration
  • Integral 3-metre lead and connector
  • Extension cables do not affect the calibration
  • Mounts in any orientation
  • 200°C bakeable version available
  • RoHS compliant

Manufactured by: AML Microelectronics
Sold and Serviced by Motion Technologies Pty Limited

Arun Pirani Gaugeheads
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